Stability analysis of quasicrystal torsion micromirror actuator based on the strain gradient theory

Huang Yunzhi; Feng Miaolin; Chen Xiuhua

doi:10.1007/s10409-021-09031-x

Volume 38 Issue 3

Feb 2022

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JOURNAL OF MECHANICAL ENGINEERING > 2022 > 38(3): 521390.

Y. Z. Huang, M. L. Feng, and X. H. Chen, Stability analysis of quasicrystal torsion micromirror actuator based on the strain gradient theory. Acta Mech. Sin., 2022, 38, http://www.w3.org/1999/xlink' xlink:href='https://doi.org/10.1007/s10409-021-09031-x'>https://doi.org/10.1007/s10409-021-09031-x

Citation:

Y. Z. Huang, M. L. Feng, and X. H. Chen, Stability analysis of quasicrystal torsion micromirror actuator based on the strain gradient theory. Acta Mech. Sin., 2022, 38, http://www.w3.org/1999/xlink" xlink:href="https://doi.org/10.1007/s10409-021-09031-x">https://doi.org/10.1007/s10409-021-09031-x

Citation:

Y. Z. Huang, M. L. Feng, and X. H. Chen, Stability analysis of quasicrystal torsion micromirror actuator based on the strain gradient theory. Acta Mech. Sin., 2022, 38, http://www.w3.org/1999/xlink" xlink:href="https://doi.org/10.1007/s10409-021-09031-x">https://doi.org/10.1007/s10409-021-09031-x

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Stability analysis of quasicrystal torsion micromirror actuator based on the strain gradient theory

doi: 10.1007/s10409-021-09031-x

Huang Yunzhi¹,
Feng Miaolin^{1,*
,
,},
Chen Xiuhua^{2,*
,
,}

1.
Department of Engineering Mechanics, School of Naval Architecture, Ocean and Civil Engineering, Shanghai Jiao Tong University,Shanghai 200240, China
2.
School of Aeronautics and Astronautics, Shanghai Jiao Tong University, Shanghai 200240, China

Funds:

the National Natural Science Foundation of China Grant

More Information

Corresponding author: Corresponding authors. E-mail addresses: mlfeng@sjtu.edu.cn (M. L. Feng); chenxiuhua@sjtu.edu.cn (X. H. Chen); Corresponding authors. E-mail addresses: mlfeng@sjtu.edu.cn (M. L. Feng); chenxiuhua@sjtu.edu.cn (X. H. Chen)
Accepted Date: 24 Sep 2021

Available Online: 01 Aug 2022

Publish Date: 07 Feb 2022
Issue Publish Date: 01 Mar 2022

Abstract

Abstract

Electrostatic torsional micromirrors are widely applied in the fields of micro-optical switches, optical attenuators, optical scanners, and optical displays. In previous lectures, most of the micromirrors were twisted along the uniaxial or biaxial direction, which limited the range of light reflection. In this paper, a quasicrystal torsional micromirror that can be deflected in any direction is designed and the dynamic model of the electrostatically driven micromirror is established. The static and dynamic phenomena and pull-in characteristics are analyzed through the numerical solution of the strain gradient theory. The results of three kinds of mirror deflection directions are compared and analyzed. The results show the significant differences in the torsion models with different deflection axis directions. When the deflection angle along the oblique axis reaches 45°, the instability voltage is the smallest. The pull-in instability voltage increases with the increment of phonon-phason coupling elastic modulus and phason elastic modulus. The permittivity of quasicrystal, the strain gradient parameter, and the air damping influence the torsion of the micromirror dynamic system. A larger pull-in instability voltage generates with the decrease of surface distributed forces.
- Quasicrystals,
- Torsion micromirror,
- Instability,
- Strain gradient theory

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References(41)

References

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