Experimental Research of Reducing the Contact Resistance of Carbon Nanotubes by High Temperature Annealing

AN Libao; LI Wen; CHEN Jia

doi:10.11936/bjutxb2016050060

Volume 43 Issue 2

Sep 2022

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JOURNAL OF MECHANICAL ENGINEERING > 2017 > 43(2): 294-298.

AN Libao, LI Wen, CHEN Jia. Experimental Research of Reducing the Contact Resistance of Carbon Nanotubes by High Temperature Annealing[J]. JOURNAL OF MECHANICAL ENGINEERING, 2017, 43(2): 294-298. doi: 10.11936/bjutxb2016050060

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AN Libao, LI Wen, CHEN Jia. Experimental Research of Reducing the Contact Resistance of Carbon Nanotubes by High Temperature Annealing[J]. JOURNAL OF MECHANICAL ENGINEERING, 2017, 43(2): 294-298. doi: 10.11936/bjutxb2016050060

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Experimental Research of Reducing the Contact Resistance of Carbon Nanotubes by High Temperature Annealing

doi: 10.11936/bjutxb2016050060

College of Mechanical Engineering, North China University of Science and Technology, Tangshan 063009, Hebei, China

Received Date: 23 May 2016
Available Online: 13 Sep 2022
Issue Publish Date: 01 Feb 2017

Abstract

Abstract

Integrating carbon nanotubes(CNTs) into micro- and nano- devices is a critical step for applying CNTs in many fields. The high contact resistance of assembled CNTs is an important factor influencing the performance of CNT-based devices. It is possible to reduce the contact resistant of CNTs by using high temperature annealing. First, CNTs were assembled by dielectrophoresis; Second, the effects of annealing temperature, annealing time, and heating rate of reducing the contact resistance of CNTs were investigated by using orthogonal experiment design and variance analysis, and the optimal parameter combination for reducing the contact resistance was obtained; Finally, the I-V characteristic before and after annealing were measured respectively. Results show that the contact resistant of CNTs can be reduced efficiently by using high temperature annealing, and the annealing temperature is the leading factor causing the reduction of the resistance. After annealing, the contact resistance can be reduced at the most by 91.59%. The I-V curves of assembled CNTs are both linear before and after annealing.
- carbon nanotube,
- contact resistance,
- high temperature annealing,
- orthogonal experiment design,
- dielectrophoresis

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References(16)

References

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