Volume 70 Issue 10
May. 2021
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Li Feng-Chao, Kong Zhen, Wu Jin-Hua, Ji Xin-Yi, Liang Jia-Jie. Advances in flexible piezoresistive pressure sensor[J]. JOURNAL OF MECHANICAL ENGINEERING, 2021, 70(10): 100703. doi: 10.7498/aps.70.20210023
Citation: Li Feng-Chao, Kong Zhen, Wu Jin-Hua, Ji Xin-Yi, Liang Jia-Jie. Advances in flexible piezoresistive pressure sensor[J]. JOURNAL OF MECHANICAL ENGINEERING, 2021, 70(10): 100703. doi: 10.7498/aps.70.20210023

Advances in flexible piezoresistive pressure sensor

doi: 10.7498/aps.70.20210023
Funds:  Project supported by the National Natural Science Foundation of China (Grant Nos. 51673099, 51872146)
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  • In recent years, the flexible piezoresistive pressure sensor has attracted widespread attention due to the trend of improved wearable electronics applied to the field of electronic skin, disease diagnosis, motion detection and health monitoring. Here in this paper, the latest progress of the exploitation of flexible piezoresistive pressure sensors is reviewed in terms of sensing mechanism, selection of sensing materials, structural design and their advanced application. Firstly, the sensing mechanism of piezoresistive pressure sensors is generally introduced from the band structure of semiconductor materials, seepage theory and tunneling effect of conductive polymer composites and changes in interface contact resistance. Based on these sensing mechanisms, various flexible piezoresistive pressure sensors with high sensitivity, broad sensing range and fast response time have been developed. The selection of composition materials and microstructural design in flexible piezoresistive pressure sensor to implement the optimization of sensing performance are emphatically presented in this review. The composition materials including organic polymer material and inorganic nanomaterial based on two-dimensional (2D) materials such as graphene and MXene are intensively exhibited. In addition to the above characteristics, these kinds of pressure sensors exhibit high mechanical reversibility and low detection limit, which is essential for detecting the minor motions like respiratory rate and pulse. Moreover, the well-designed structures applied to the composition analysis are also overviewed, such as the sea urchin-like structure, spongy porous structure and regular structure. Various designed structures provide further properties like stability for the flexible pressure sensor. However, comparing with traditional pressure sensor, the mass production and application of flexible pressure sensor are confronting several barriers, like the high cost of raw materials and relatively complex manufacturing processes. How to achieve the low cost and low energy consumption simultaneously on the basis of excellent performance is still a challenge to expanding the applications of flexible pressure sensor. Novel sensing mechanism, functional materials and synthetic integration are expected to be developed in the future. And also, the potential application of flexible pressure sensor will be further expanded after endowing it with more functions.

     

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  • [1]
    Meng J, Li Z 2020 Adv. Mater. 32 2000130 doi: 10.1002/adma.202000130
    [2]
    Trung T Q, Lee N E 2016 Adv. Mater. 28 4338 doi: 10.1002/adma.201504244
    [3]
    Hua Q, Sun J, Liu H, Bao R, Yu R, Zhai J, Pan C, Wang Z L 2018 Nat. Commun. 9 244 doi: 10.1038/s41467-017-02685-9
    [4]
    Li J, Bao R R, Tao J, Peng Y Y, Pan C F 2018 J. Mater. Chem. C 6 11878 doi: 10.1039/C8TC02946F
    [5]
    Amit M, Chukoskie L, Skalsky A J, Garudadri H, Ng T N 2020 Adv. Funct. Mater. 30 1905241 doi: 10.1002/adfm.201905241
    [6]
    Mannsfeld S C B, Tee B C K, Stoltenberg R M, Chen C V H H, Barman S, Muir B V O, Sokolov A N, Reese C, Bao Z 2010 Nat. Mater. 9 859 doi: 10.1038/nmat2834
    [7]
    Konishi S, Hirata A 2019 Sci. Rep. 9 15634 doi: 10.1038/s41598-019-52022-x
    [8]
    Jeon J, Lee H B R, Bao Z 2013 Adv. Mater. 25 850 doi: 10.1002/adma.201204082
    [9]
    Zhou J, Gu Y, Fei P, Mai W, Gao Y, Yang R, Bao G, Wang Z L 2008 Nano Lett. 8 3035 doi: 10.1021/nl802367t
    [10]
    Han Z, Liu L, Zhang J, Han Q, Wang K, Song H, Wang Z, Jiao Z, Niu S, Ren L 2018 Nanoscale 10 15178 doi: 10.1039/C8NR02514B
    [11]
    Guo H, Lan C, Zhou Z, Sun P, Wei D, Li C 2017 Nanoscale 9 6246 doi: 10.1039/C7NR01016H
    [12]
    Ma L, Wu R, Patil A, Zhu S, Meng Z, Meng H, Hou C, Zhang Y, Liu Q, Yu R, Wang J, Lin N, Liu X Y 2019 Adv. Funct. Mater. 29 1904549 doi: 10.1002/adfm.201904549
    [13]
    Tien N T, Jeon S, Kim D I, Trung T Q, Jang M, Hwang B U, Byun K E, Bae J, Lee E, Tok J B H, Bao Z, Lee N E, Park J J 2014 Adv. Mater. 26 796 doi: 10.1002/adma.201302869
    [14]
    Huang Y, Fan X, Chen S C, Zhao N 2019 Adv. Funct. Mater. 29 1808509 doi: 10.1002/adfm.201808509
    [15]
    Xiong Y, Shen Y, Tian L, Hu Y, Zhu P, Sun R, Wong C P 2020 Nano Energy 70 104436 doi: 10.1016/j.nanoen.2019.104436
    [16]
    Nela L, Tang J, Cao Q, Tulevski G, Han S J 2018 Nano Lett. 18 2054 doi: 10.1021/acs.nanolett.8b00063
    [17]
    Luo N, Dai W, Li C, Zhou Z, Lu L, Poon C C Y, Chen S C, Zhang Y, Zhao N 2016 Adv. Funct. Mater. 26 1178 doi: 10.1002/adfm.201504560
    [18]
    Shi J, Wang L, Dai Z, Zhao L, Du M, Li H, Fang Y 2018 Small 14 1800819 doi: 10.1002/smll.201800819
    [19]
    Yang J, Luo S, Zhou X, Li J, Fu J, Yang W, Wei D 2019 ACS Appl. Mater. Interfaces 11 14997 doi: 10.1021/acsami.9b02049
    [20]
    Nie B, Li R, Cao J, Brandt J D, Pan T 2015 Adv. Mater. 27 6055 doi: 10.1002/adma.201502556
    [21]
    Signore M A, Rescio G, de Pascali C, Iacovacci V, Dario P, Leone A, Quaranta F, Taurino A, Siciliano P, Francioso L 2019 Sci. Rep. 9 17130 doi: 10.1038/s41598-019-53713-1
    [22]
    Yang Y, Pan H, Xie G, Jiang Y, Chen C, Su Y, Wang Y, Tai H 2020 Sens. Actuators, A 301 111789 doi: 10.1016/j.sna.2019.111789
    [23]
    He W, Sohn M, Ma R, Kang D J 2020 Nano Energy 78 105383 doi: 10.1016/j.nanoen.2020.105383
    [24]
    Yang D, Guo H, Chen X, Wang L, Jiang P, Zhang W, Zhang L, Wang Z L 2020 J. Mater. Chem. A 8 23827 doi: 10.1039/D0TA08223F
    [25]
    Wang J, Jiang J, Zhang C, Sun M, Han S, Zhang R, Liang N, Sun D, Liu H 2020 Nano Energy 76 105050 doi: 10.1016/j.nanoen.2020.105050
    [26]
    Guan X, Wang Z, Zhao W, Huang H, Wang S, Zhang Q, Zhong D, Lin W, Ding N, Peng Z 2020 ACS Appl. Mater. Interfaces 12 26137 doi: 10.1021/acsami.0c03326
    [27]
    Ruth S R A, Feig V R, Tran H, Bao Z 2020 Adv. Funct. Mater. 30 2003491 doi: 10.1002/adfm.202003491
    [28]
    Li W D, Pu J H, Zhao X, Jia J, Ke K, Bao R Y, Liu Z Y, Yang M B, Yang W 2020 J. Mater. Chem. C 8 16774 doi: 10.1039/D0TC03961F
    [29]
    He J, Xiao P, Lu W, Shi J, Zhang L, Liang Y, Pan C, Kuo S W, Chen T 2019 Nano Energy 59 422 doi: 10.1016/j.nanoen.2019.02.036
    [30]
    He J, Zhang Y, Zhou R, Meng L, Chen T, Mai W, Pan C 2020 J. Materiomics 6 86 doi: 10.1016/j.jmat.2020.01.009
    [31]
    Wu Q, Qiao Y, Guo R, Naveed S, Hirtz T, Li X, Fu Y, Wei Y, Deng G, Yang Y, Wu X, Ren T L 2020 ACS Nano 14 10104 doi: 10.1021/acsnano.0c03294
    [32]
    Park J, Kim J, Hong J, Lee H, Lee Y, Cho S, Kim S W, Kim J J, Kim S Y, Ko H 2018 NPG Asia Mater. 10 163 doi: 10.1038/s41427-018-0031-8
    [33]
    Shu Y, Tian H, Yang Y, Li C, Cui Y, Mi W, Li Y, Wang Z, Deng N, Peng B, Ren T L 2015 Nanoscale 7 8636 doi: 10.1039/C5NR01259G
    [34]
    Fiorillo A S, Critello C D, Pullano S A 2018 Sens. Actuators, A 281 156 doi: 10.1016/j.sna.2018.07.006
    [35]
    Naumov P, Huangfu S, Wu X, Schilling A, Thomale R, Felser C, Medvedev S, Jeschke H O, von Rohr F O 2019 Phys. Rev. B 100 155113 doi: 10.1103/PhysRevB.100.155113
    [36]
    Cao M, Su J, Fan S, Qiu H, Su D, Li L 2021 Chem. Eng. J. 406 126777 doi: 10.1016/j.cej.2020.126777
    [37]
    Haniff M A S M, Hafiz S M, Huang N M, Rahman S A, Wahid K A A, Syono M I, Azid I A 2017 ACS Appl. Mater. Interfaces 9 15192 doi: 10.1021/acsami.7b02833
    [38]
    Pereira V M, Castro Neto A H, Peres N M R 2009 Phys. Rev. B 80 045401
    [39]
    Lipomi D J, Lee J A, Vosgueritchian M, Tee B C K, Bolander J A, Bao Z 2012 Chem. Mater. 24 373 doi: 10.1021/cm203216m
    [40]
    Chen Z, Ming T, Goulamaly M M, Yao H, Nezich D, Hempel M, Hofmann M, Kong J 2016 Adv. Funct. Mater. 26 5061 doi: 10.1002/adfm.201503674
    [41]
    Choi J, Kwon D, Kim K, Park J, Orbe D D, Gu J, Ahn J, Cho I, Jeong Y, Oh Y, Park I 2020 ACS Appl. Mater. Interfaces 12 1698 doi: 10.1021/acsami.9b20097
    [42]
    Chen M, Luo W, Xu Z, Zhang X, Xie B, Wang G, Han M 2019 Nat. Commun. 10 4024 doi: 10.1038/s41467-019-12030-x
    [43]
    Zhao Z, Zhang J, Zhang J, Li C, Li Y, Wang X 2017 Sens. Actuators, A 263 648 doi: 10.1016/j.sna.2017.07.030
    [44]
    Strümpler R, Glatz-Reichenbach J 1999 J. Electroceram. 3 329 doi: 10.1023/A:1009909812823
    [45]
    Wang M, Gurunathan R, Imasato K, Geisendorfer N R, Jakus A E, Peng J, Shah R N, Grayson M, Snyder G J 2019 Adv. Theory Simul. 2 1800125 doi: 10.1002/adts.201800125
    [46]
    Wang S, Chen G, Niu S, Chen K, Gan T, Wang Z, Wang H, Du P, Leung C W, Qu S 2019 ACS Appl. Mater. Interfaces 11 48331 doi: 10.1021/acsami.9b16215
    [47]
    Hu N, Karube Y, Yan C, Masuda Z, Fukunaga H 2008 Acta Mater. 56 2929 doi: 10.1016/j.actamat.2008.02.030
    [48]
    Park J, Lee Y, Hong J, Ha M, Jung Y D, Lim H, Kim S Y, Ko H 2014 ACS Nano 8 4689 doi: 10.1021/nn500441k
    [49]
    Sreeprasad T S, Rodriguez A A, Colston J, Graham A, Shishkin E, Pallem V, Berry V 2013 Nano Lett. 13 1757 doi: 10.1021/nl4003443
    [50]
    Amjadi M, Pichitpajongkit A, Lee S, Ryu S, Park I 2014 ACS Nano 8 5154 doi: 10.1021/nn501204t
    [51]
    Simmons J G 1963 J. Appl. Phys. 34 1793 doi: 10.1063/1.1702682
    [52]
    Yang H, Yuan L, Yao X, Fang D 2020 J. Mech. Phys. Solids 139 103943 doi: 10.1016/j.jmps.2020.103943
    [53]
    Higashisaka T, Nagato K, Tomizawa M, Tanaka E, Watanabe H, Nakao M 2019 Microelectron. Eng. 216 111058 doi: 10.1016/j.mee.2019.111058
    [54]
    Hamedi M, Atashparva M 2017 Weld. World 61 269 doi: 10.1007/s40194-016-0419-4
    [55]
    Matsuda Y, Deng W Q, Goddard W A 2010 J. Phys. Chem. C 114 17845 doi: 10.1021/jp806437y
    [56]
    Paulson S, Helser A, Nardelli M B, Taylor R M, Falvo M, Superfine R, Washburn S 2000 Science 290 1742 doi: 10.1126/science.290.5497.1742
    [57]
    Timsit R S 1999 IEEE Trans. Compon. Packag. Technol. 22 85 doi: 10.1109/6144.759357
    [58]
    Gao L, Zhu C, Li L, Zhang C, Liu J, Yu H D, Huang W 2019 ACS Appl. Mater. Interfaces 11 25034 doi: 10.1021/acsami.9b07465
    [59]
    Doshi S M, Thostenson E T 2018 ACS Sens. 3 1276 doi: 10.1021/acssensors.8b00378
    [60]
    Guo Y, Zhong M, Fang Z, Wan P, Yu G 2019 Nano Lett. 19 1143 doi: 10.1021/acs.nanolett.8b04514
    [61]
    Lee D, Lee H, Jeong Y, Ahn Y, Nam G, Lee Y 2016 Adv. Mater. 28 9364 doi: 10.1002/adma.201603526
    [62]
    Wang Y, Zhu C, Pfattner R, Yan H, Jin L, Chen S, Molina-Lopez F, Lissel F, Liu J, Rabiah N I, Chen Z, Chung J W, Linder C, Toney M F, Murmann B, Bao Z 2017 Sci. Adv. 3 e1602076 doi: 10.1126/sciadv.1602076
    [63]
    Jang H H, Park J S, Choi B 2019 Sens. Actuators, A 286 107 doi: 10.1016/j.sna.2018.12.015
    [64]
    Choong C L, Shim M B, Lee B S, Jeon S, Ko D S, Kang T H, Bae J, Lee S H, Byun K E, Im J, Jeong Y J, Park C E, Park J J, Chung U I 2014 Adv. Mater. 26 3451 doi: 10.1002/adma.201305182
    [65]
    Yang J C, Kim J O, Oh J, Kwon S Y, Sim J Y, Kim D W, Choi H B, Park S 2019 ACS Appl. Mater. Interfaces 11 19472 doi: 10.1021/acsami.9b03261
    [66]
    Qiu L, Liu J Z, Chang S L Y, Wu Y, Li D 2012 Nat. Commun. 3 1241 doi: 10.1038/ncomms2251
    [67]
    Cheng Y, Ma Y, Li L, Zhu M, Yue Y, Liu W, Wang L, Jia S, Li C, Qi T, Wang J, Gao Y 2020 ACS Nano 14 2145 doi: 10.1021/acsnano.9b08952
    [68]
    Chu Y, Zhong J, Liu H, Ma Y, Liu N, Song Y, Liang J, Shao Z, Sun Y, Dong Y, Wang X, Lin L 2018 Adv. Funct. Mater. 28 1803413 doi: 10.1002/adfm.201803413
    [69]
    Zhang Z, Zhang Y, Jiang X, Bukhari H, Zhang Z, Han W, Xie E 2019 Carbon 155 71 doi: 10.1016/j.carbon.2019.08.018
    [70]
    Gao Y, Ota H, Schaler E W, Chen K, Zhao A, Gao W, Fahad H M, Leng Y, Zheng A, Xiong F, Zhang C, Tai L C, Zhao P, Fearing R S, Javey A 2017 Adv. Mater. 29 1701985 doi: 10.1002/adma.201701985
    [71]
    Kim G, Cho S, Chang K, Kim W S, Kang H, Ryu S P, Myoung J, Park J, Park C, Shim W 2017 Adv. Mater. 29 1606120 doi: 10.1002/adma.201606120
    [72]
    Zheng M, Li W, Xu M, Xu N, Chen P, Han M, Xie B 2014 Nanoscale 6 3930 doi: 10.1039/C3NR04135B
    [73]
    Huang C B, Witomska S, Aliprandi A, Stoeckel M A, Bonini M, Ciesielski A, Samorì P 2019 Adv. Mater. 31 1804600 doi: 10.1002/adma.201804600
    [74]
    Zhao Y, Song J G, Ryu G H, Ko K Y, Woo W J, Kim Y, Kim D, Lim J H, Lee S, Lee Z, Park J, Kim H 2018 Nanoscale 10 9338 doi: 10.1039/C8NR00108A
    [75]
    Htwe Y Z N, Chow W S, Suriati G, Thant A A, Mariatti M 2019 Synth. Met. 256 116120 doi: 10.1016/j.synthmet.2019.116120
    [76]
    Vuorinen T, Niittynen J, Kankkunen T, Kraft T M, Mäntysalo M 2016 Sci. Rep. 6 35289 doi: 10.1038/srep35289
    [77]
    Hassan G, Khan M U, Bae J, Shuja A 2020 Sci. Rep. 10 18234 doi: 10.1038/s41598-020-75175-6
    [78]
    Liu T, Liu M, Dou S, Sun J, Cong Z, Jiang C, Du C, Pu X, Hu W, Wang Z L 2018 ACS Nano 12 2818 doi: 10.1021/acsnano.8b00108
    [79]
    Yeo W H, Kim Y S, Lee J, Ameen A, Shi L, Li M, Wang S, Ma R, Jin S H, Kang Z, Huang Y, Rogers J A 2013 Adv. Mater. 25 2773 doi: 10.1002/adma.201204426
    [80]
    Wu H, Liu Q, Du W, Li C, Shi G 2018 ACS Appl. Mater. Interfaces 10 3895 doi: 10.1021/acsami.7b19014
    [81]
    Wang Z, Volinsky A A, Gallant N D 2014 J. Appl. Polym. Sci. 131 4105
    [82]
    Tahk D, Lee H H, Khang D Y 2009 Macromolecules 42 7079 doi: 10.1021/ma900137k
    [83]
    Li J, Orrego S, Pan J, He P, Kang S H 2019 Nanoscale 11 2779 doi: 10.1039/C8NR09959F
    [84]
    Ma Z, Wei A, Ma J, Shao L, Jiang H, Dong D, Ji Z, Wang Q, Kang S 2018 Nanoscale 10 7116 doi: 10.1039/C8NR00004B
    [85]
    Lee D, Kim J, Kim H, Heo H, Park K, Lee Y 2018 Nanoscale 10 18812 doi: 10.1039/C8NR05843A
    [86]
    Kou H, Zhang L, Tan Q, Liu G, Dong H, Zhang W, Xiong J 2019 Sci. Rep. 9 3916 doi: 10.1038/s41598-019-40828-8
    [87]
    Schlicke H, Kunze S, Rebber M, Schulz N, Riekeberg S, Trieu H K, Vossmeyer T 2020 Adv. Funct. Mater. 30 2003381 doi: 10.1002/adfm.202003381
    [88]
    Schlicke H, Rebber M, Kunze S, Vossmeyer T 2016 Nanoscale 8 183 doi: 10.1039/C5NR06937H
    [89]
    Tang Y, Gong S, Chen Y, Yap L W, Cheng W 2014 ACS Nano 8 5707 doi: 10.1021/nn502702a
    [90]
    Gong S, Schwalb W, Wang Y, Chen Y, Tang Y, Si J, Shirinzadeh B, Cheng W 2014 Nat. Commun. 5 3132 doi: 10.1038/ncomms4132
    [91]
    Li Y, Han D, Jiang C, Xie E, Han W 2019 Adv. Mater. Technol. 4 1800504 doi: 10.1002/admt.201800504
    [92]
    Wu J, Li H, Lai X, Chen Z, Zeng X 2020 Chem. Eng. J. 386 123998 doi: 10.1016/j.cej.2019.123998
    [93]
    Azhari S, Termeh Yousefi A, Tanaka H, Khajeh A, Kuredemus N, Mansouri Bigdeli M, Hamidon M N 2017 Sens. Actuators, A 266 158 doi: 10.1016/j.sna.2017.09.026
    [94]
    Chen H, Su Z, Song Y, Cheng X, Chen X, Meng B, Song Z, Chen D, Zhang H 2017 Adv. Funct. Mater. 27 1604434 doi: 10.1002/adfm.201604434
    [95]
    Mohammad Haniff M A S, Muhammad Hafiz S, Wahid K A A, Endut Z, Wah Lee H, Bien D C S, Abdul Azid I, Abdullah M Z, Ming Huang N, Abdul Rahman S 2015 Sci. Rep. 5 14751 doi: 10.1038/srep14751
    [96]
    Mattevi C, Kim H, Chhowalla M 2011 J. Mater. Chem. 21 3324 doi: 10.1039/C0JM02126A
    [97]
    Zhu S E, Ghatkesar M K, Zhang C, Janssen G C A M 2013 Appl. Phys. Lett. 102 161904 doi: 10.1063/1.4802799
    [98]
    Luo N, Huang Y, Liu J, Chen S C, Wong C P, Zhao N 2017 Adv. Mater. 29 1702675 doi: 10.1002/adma.201702675
    [99]
    Bae G Y, Pak S W, Kim D, Lee G, Kim D H, Chung Y, Cho K 2016 Adv. Mater. 28 5300 doi: 10.1002/adma.201600408
    [100]
    Pang Y, Tian H, Tao L, Li Y, Wang X, Deng N, Yang Y, Ren T L 2016 ACS Appl. Mater. Interfaces 8 26458 doi: 10.1021/acsami.6b08172
    [101]
    Zhu B, Niu Z, Wang H, Leow W R, Wang H, Li Y, Zheng L, Wei J, Huo F, Chen X 2014 Small 10 3625 doi: 10.1002/smll.201401207
    [102]
    Yang T, Wang W, Zhang H, Li X, Shi J, He Y, Zheng Q, Li Z, Zhu H 2015 ACS Nano 9 10867 doi: 10.1021/acsnano.5b03851
    [103]
    Sheng L, Liang Y, Jiang L, Wang Q, Wei T, Qu L, Fan Z 2015 Adv. Funct. Mater. 25 6545 doi: 10.1002/adfm.201502960
    [104]
    Shi X, Liu S, Sun Y, Liang J, Chen Y 2018 Adv. Funct. Mater. 28 1800850 doi: 10.1002/adfm.201800850
    [105]
    Van Lier G, Van Alsenoy C, Van Doren V, Geerlings P 2000 Chem. Phys. Lett. 326 181 doi: 10.1016/S0009-2614(00)00764-8
    [106]
    Dillon A D, Ghidiu M J, Krick A L, Griggs J, May S J, Gogotsi Y, Barsoum M W, Fafarman A T 2016 Adv. Funct. Mater. 26 4162 doi: 10.1002/adfm.201600357
    [107]
    Lipatov A, Lu H, Alhabeb M, Anasori B, Gruverman A, Gogotsi Y, Sinitskii A 2018 Sci. Adv. 4 eaat0491 doi: 10.1126/sciadv.aat0491
    [108]
    Ma Y, Liu N, Li L, Hu X, Zou Z, Wang J, Luo S, Gao Y 2017 Nat. Commun. 8 1207 doi: 10.1038/s41467-017-01136-9
    [109]
    Ma Y, Yue Y, Zhang H, Cheng F, Zhao W, Rao J, Luo S, Wang J, Jiang X, Liu Z, Liu N, Gao Y 2018 ACS Nano 12 3209 doi: 10.1021/acsnano.7b06909
    [110]
    Wang L, Zhang M, Yang B, Tan J, Ding X 2020 ACS Nano 14 10633 doi: 10.1021/acsnano.0c04888
    [111]
    Gao Y, Yan C, Huang H, Yang T, Tian G, Xiong D, Chen N, Chu X, Zhong S, Deng W, Fang Y, Yang W 2020 Adv. Funct. Mater. 30 1909603 doi: 10.1002/adfm.201909603
    [112]
    Wang Z, Wang S, Zeng J, Ren X, Chee A J Y, Yiu B Y S, Chung W C, Yang Y, Yu A C H, Roberts R C, Tsang A C O, Chow K W, Chan P K L 2016 Small 12 3827 doi: 10.1002/smll.201601419
    [113]
    Pan H, Xie G, Pang W, Wang S, Wang Y, Jiang Z, Du X, Tai H 2020 ACS Appl. Mater. Interfaces 12 38805 doi: 10.1021/acsami.0c11658
    [114]
    Teixeira J, Horta-Romarís L, Abad M J, Costa P, Lanceros-Méndez S 2018 Materials & Design 141 1
    [115]
    Han S, Jiao F, Khan Z U, Edberg J, Fabiano S, Crispin X 2017 Adv. Funct. Mater. 27 1703549 doi: 10.1002/adfm.201703549
    [116]
    Han S, Alvi N U H, Granlöf L, Granberg H, Berggren M, Fabiano S, Crispin X 2019 Adv. Sci 6 1802128 doi: 10.1002/advs.201802128
    [117]
    Wagner S, Yim C, McEvoy N, Kataria S, Yokaribas V, Kuc A, Pindl S, Fritzen C P, Heine T, Duesberg G S, Lemme M C 2018 Nano Lett. 18 3738 doi: 10.1021/acs.nanolett.8b00928
    [118]
    Si Y, Wang X, Yan C, Yang L, Yu J, Ding B 2016 Adv. Mater. 28 9512 doi: 10.1002/adma.201603143
    [119]
    Wang Q, Jian M, Wang C, Zhang Y 2017 Adv. Funct. Mater. 27 1605657 doi: 10.1002/adfm.201605657
    [120]
    Li X, Fan Y J, Li H Y, Cao J W, Xiao Y C, Wang Y, Liang F, Wang H L, Jiang Y, Wang Z L, Zhu G 2020 ACS Nano 14 9605 doi: 10.1021/acsnano.9b10230
    [121]
    He R, Yang P 2006 Nat. Nanotechnol. 1 42 doi: 10.1038/nnano.2006.53
    [122]
    Ghosh R, Song M S, Park J, Tchoe Y, Guha P, Lee W, Lim Y, Kim B, Kim S W, Kim M, Yi G C 2021 Nano Energy 80 105537 doi: 10.1016/j.nanoen.2020.105537
    [123]
    Pandey V, Mandal A, Sisle S, Gururajan M P, Dusane R O 2020 Sens. Actuators, A 316 112372 doi: 10.1016/j.sna.2020.112372
    [124]
    Peng S, Blanloeuil P, Wu S, Wang C H 2018 Adv. Mater. Interfaces 5 1800403 doi: 10.1002/admi.201800403
    [125]
    Pang Y, Zhang K, Yang Z, Jiang S, Ju Z, Li Y, Wang X, Wang D, Jian M, Zhang Y, Liang R, Tian H, Yang Y, Ren T L 2018 ACS Nano 12 2346 doi: 10.1021/acsnano.7b07613
    [126]
    Wang K, Lou Z, Wang L, Zhao L, Zhao S, Wang D, Han W, Jiang K, Shen G 2019 ACS Nano 13 9139 doi: 10.1021/acsnano.9b03454
    [127]
    Yue Y, Liu N, Liu W, Li M, Ma Y, Luo C, Wang S, Rao J, Hu X, Su J, Zhang Z, Huang Q, Gao Y 2018 Nano Energy 50 79 doi: 10.1016/j.nanoen.2018.05.020
    [128]
    Lv L, Zhang P, Xu T, Qu L 2017 ACS Appl. Mater. Interfaces 9 22885 doi: 10.1021/acsami.7b07153
    [129]
    Xiao J, Tan Y, Song Y, Zheng Q 2018 J. Mater. Chem. A 6 9074 doi: 10.1039/C7TA11348J
    [130]
    Yao H B, Ge J, Wang C F, Wang X, Hu W, Zheng Z J, Ni Y, Yu S H 2013 Adv. Mater. 25 6692 doi: 10.1002/adma.201303041
    [131]
    Cao X, Zhang J, Chen S, Varley R J, Pan K 2020 Adv. Funct. Mater. 30 2003618 doi: 10.1002/adfm.202003618
    [132]
    Tsui M N, Islam M F 2017 Nanoscale 9 1128 doi: 10.1039/C6NR07432D
    [133]
    Ding Y, Xu T, Onyilagha O, Fong H, Zhu Z 2019 ACS Appl. Mater. Interfaces 11 6685 doi: 10.1021/acsami.8b20929
    [134]
    Deville S, Saiz E, Nalla R K, Tomsia A P 2006 Science 311 515 doi: 10.1126/science.1120937
    [135]
    Yu S, Li L, Wang J, Liu E, Zhao J, Xu F, Cao Y, Lu C 2020 Adv. Funct. Mater. 30 1907091 doi: 10.1002/adfm.201907091
    [136]
    Wang Z, Guan X, Huang H, Wang H, Lin W, Peng Z 2019 Adv. Funct. Mater. 29 1807569 doi: 10.1002/adfm.201807569
    [137]
    Huang Y, Chen Y, Fan X, Luo N, Zhou S, Chen S C, Zhao N, Wong C P 2018 Small 14 1801520 doi: 10.1002/smll.201801520
    [138]
    Shin K Y, Lee J S, Jang J 2016 Nano Energy 22 95 doi: 10.1016/j.nanoen.2016.02.012
    [139]
    Gerratt A P, Michaud H O, Lacour S P 2015 Adv. Funct. Mater. 25 2287 doi: 10.1002/adfm.201404365
    [140]
    Zhan Z, Lin R, Tran V T, An J, Wei Y, Du H, Tran T, Lu W 2017 ACS Appl. Mater. Interfaces 9 37921 doi: 10.1021/acsami.7b10820
    [141]
    Tee B C K, Chortos A, Berndt A, Nguyen A K, Tom A, McGuire A, Lin Z C, Tien K, Bae W G, Wang H, Mei P, Chou H H, Cui B, Deisseroth K, Ng T N, Bao Z 2015 Science 350 313 doi: 10.1126/science.aaa9306
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