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摘要: 光谱分析技术具有快速、准确和绿色检测的特点,在科学研究、信息、生物医疗、食药检测、农业、环境和安防等领域有广泛而且重要的应用。然而现有光谱技术与检测设备通常较为庞大复杂,难以适合现场快检、轻载荷平台等便携式应用场景。近年来,微型光谱检测技术和设备受到广泛关注并得到迅速发展,具有尺寸、重量、功耗等方面的显著优势,尤其是基于散斑检测的计算光谱分析技术,可以通过记录分析散射元件对被测光形成的散斑图获得高精度的光谱信息。本文将介绍相关技术原理和技术发展现状,分析现有技术性能和优缺点,讨论并总结未来发展方向和应用前景。Abstract: Fast, accurate and nondestructive spectral analysis technique is important and widely used in the fields of scientific research, information, biomedical, pharmaceutical detection, agriculture, environment, and security. However, the existing spectroscopic analysis equipments are usually bulky and complex, which are difficult to adapt to portable application scenarios such as on-site rapid detection, light-load platform, etc. In recent years, miniature spectroscopic detection technology and equipment have received extensive attention, and have been rapidly developed, with significant advantages in size, weight, and power consumption. In particular, the computational spectral analysis technology based on the speckle detection can obtain high-precision spectral information by recording and analyzing the speckle pattern formed by the scattering element on the measured light. This paper will first introduce the related technical principles and technological developments, then analyze the existing techniques including the advantages and disadvantages, and finally discuss and summarize the future development direction and application prospects.
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Key words:
- spectrum /
- speckle /
- microspectrometer /
- compressive sensing
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图 1 散斑检测的微型计算光谱仪原理图。(a) 入射光经过散射元件后在探测器阵列上形成散斑分布的示意图;(b) 基于映射矩阵的待测光谱重构原理示意图
Figure 1. Schematic diagram of micro-computing spectrometer for speckle detection. (a) Schematic of speckle pattern distribution on the detector array after the incident light passing through the dispersive component; (b) Schematic diagram of spectral reconstruction measured based on mapping matrix
图 2 多模光纤的微型光谱仪示意图。(a) 不同波长入射光在5 m长多模光纤出射端的散斑分布、谱自相关函数和窄带激光谱线测试结果[45];(b) 基于七根多模光纤波分复用的光纤微型光谱仪和100 nm宽带范围的光谱测试结果[48];(c) 基于光开关空分复用的光纤微型光谱仪、谱自相关函数和窄带激光谱线测试结果[59];(d) 基于拉锥光纤的光纤微型光谱仪、不同波长散斑分布和窄带激光谱线测试结果[60]
Figure 2. Diagram of miniature spectrometer with multimode fiber. (a) Speckle pattern intensity distribution at the end of a 5 m long multimode fiber with varying input wavelength, spectral correlation function of the different length multimode fiber, and 5 m long multimode fiber spectrometer can resolve narrow-band laser spectral lines[45]; (b) Fiber spectrometer with wavelength division multiplexers and a 1-to-7 fan-out fiber bundle, reconstructed spectrum test results in the 100 nm bandwidth[48]; (c) Miniature multimode fiber spectrometer using optical switch space-division multiplexing, spectral correlation function, reconstructed narrow spectral lines test results[59]; (d) Miniature spectrometer using multimode tapered optical fibre, speckle pattern intensity distribution with varying input wavelength, and reconstructed narrow spectral lines test results[60]
图 3 平面条形光波导的微型光谱仪。(a) 基于多模螺旋波导的微型光谱仪示意图、不同波长散斑分布、谱自相关函数和窄带激光谱线测试结果[46];(b) 基于级联光开关阵列的光谱测试范围扩展技术和测试结果[63]
Figure 3. Diagram of a miniature spectrometer with a planar strip optical waveguide. (a) Schematic of a spiral spectrometer, speckle pattern intensity distribution with varying input wavelength, spectral correlation function, and reconstructed narrow laser spectral lines test results[46]; (b) Schematic of input switch matrix silicon multimode waveguide spectrometer, and reconstructed test results[63]
图 4 平面光子晶体及微环光波导的微型光谱仪示意图。(a) 基于光子晶体超棱镜效应的微型光谱仪示意图和不同波长在输出波导处形成的散斑分布[65];(b) 基于微环谐振腔阵列的微型光谱仪、不同波长对应的面外散斑分布和光谱测试结果[69];(c) 基于数字平面全息图光谱仪示意图、散斑分布和光谱测试结果[71]
Figure 4. Diagram of miniature spectrometer with planar photonic crystal and micro-ring optical waveguide. (a) Schematic of integrated photonic crystal spectrometers, and speckle distribution with different wavelengths at the output waveguide[65]; (b) Micro-spectrometer based on miniaturized microdonut resonators array, out-of-plane speckle pattern intensity distribution with varying input wavelength, and reconstructed spectral test results[69]; (c) Schematic of an integrated digital plane hologram spectrometer, speckle pattern intensity distribution, and reconstructed spectral test results[71]
图 5 平面散射体导光结构的微型光谱仪。(a) 基于无序光子结构的光谱仪的SEM图像,底部方框区域为放大的图像,比例尺为1 μm。右边为在1500 nmTE偏振光数值模拟结果示意图和在1500 nm处实验结果图像[47];(b) 无序光子结构的校准矩阵[47];(c) 基于无序光子结构所有检测通道上的平均光强度的光谱相关函数[47];(d) 基于无序光子晶体结构光谱仪的窄带激光谱线测试结果[47]
Figure 5. Miniature spectrometer with plane scatter light guide structure. (a) SEM image of the disordered photonic spectrometer, the bottom area is an enlarged image with a scale of 1 μm, the right area is numerical simulation and experimental results at 1500 nm[47]; (b) Calibration matrix of disordered photonic structure[47]; (c) The spectral correlation function based on the average intensity of all detection channels[47]; (d) Disordered photonic spectrometer can resolve narrow-band laser spectral lines[47]
图 6 部分空间型光谱仪。(a) 基于非均匀自组装光子晶体的微型光谱仪示意图、散斑分布和光谱测试结果[74];(b) 氧化铝颗粒的SEM图像和远场散斑图[75]
Figure 6. Part of spatial type spectrometer. (a) Schematic of miniature spectrometer based on inhomogeneous and self-assembled disordered photonic crystals, speckle pattern distribution, and spectral test results[74]; (b) SEM image and far-field speckle pattern of alumina particles[75]
图 7 空间散射结构型光谱仪。(a) 基于微米孔阵列的微型光谱仪示意图、散斑分布和光谱测试结果[49];(b) 基于磨砂玻璃的微型光谱仪示意图,以及可见光和紫外波段的光谱测试结果[14];(c) 基于磨砂玻璃的方法并结合上下转换材料分别在紫外、可见光、红外三个波段的光谱测试结果[77]
Figure 7. Space scattering structure type spectrometer. (a) Schematic of miniature spectrometer based on hole array, speckle distribution and spectrum test results[49]; (b) Schematic of a miniature spectrometer based on frosted glass, and the spectrum test results in the visible and ultraviolet bands[14]; (c) The frosted glass spectrometer using up conversion and down conversion materials spectral test results in the three bands of ultraviolet, visible and infrared[77]
图 8 相位板、光栅和纳米颗粒结构型光谱仪。(a) 基于相位版的光谱分析技术:两类相位版的槽深分布、散斑分布和对应的谱自相关函数[33];(b) 基于无序取向的光栅单元阵列的微型光谱仪示意图[79];(c) 基于纳米颗粒散斑增强的棱镜光谱仪示意图和散斑分布[80]
Figure 8. Polychromats, grating, and nanoparticles structure type spectrometer. (a) Spectral analysis based on the polychromats: the groove depth distribution, speckle pattern distribution and correlation function of the two types of polychromats[33]; (b) Schematic diagram of the random grating array speckle spectrometer[79]; (c) Schematic of nanoparticles speckle-enhanced prism spectrometer[80]
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