Embedded gold-plated fiber Bragg grating temperature and stress sensors encapsulated in capillary copper tube
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摘要: 为了实现复杂、恶劣环境下工程机械表面无损的应力监测方式，实现对大型工程机械的实时动态监测，提出了基于磁控溅射技术的光纤布拉格光栅(FBG)应力传感器封装方法。并对完全嵌套(整个栅区嵌套毛细铜管)和两端嵌套(栅区两端嵌套毛细铜管)两种封装方法开展了研究。从理论分析和有限元仿真的角度比较了传感器的增敏效果，前后结果一致。制备了传感器实物并进行了温度、应力和对比实验。仿真实验结果表明，该模型下FBG传感器能提高约7.5%的灵敏度。温度实验表明第二种封装结构的温度反馈相关系数R2达到了0.99948，在30 ℃~80 ℃范围内呈现良好的线性度；应力实验的相关系数R2也达到0.99924，灵敏度为6.14 pm/MPa，在该实验搭建的解调系统下精度达到0.05 MPa，可以快速、精确地解调应力。对比实验表明，光栅解调仪组成的监测系统比应变片组成的监测系统具有更高的精度，最大偏差值减小了59.8%。嵌套毛细铜管的金属化方式结合有机胶固定的封装结构简单、灵敏度和精度高，可以满足大型工程机械表面无损实时健康监测的需求。
Abstract: In order to realize the non-destructive and real-time dynamic stress monitoring method of the construction machinery surface in complex and harsh environments, a fiber Bragg grating (FBG) stress sensor packaging method based on magnetron sputtering technology is proposed. Two packaging methods of complete embedding (the capillary copper tube embedded in the entire grating area) and two sides embedding (capillary copper tube nested at both ends of the grating area) are studied. The sensitization effect of the sensor is analyzed from the perspective of theory and finite element, and the results are consistent. The physical sensors are made, and temperature, stress, and comparison experiments are carried out. Simulation and experiment show that the FBG sensor improves the sensitivity by about 7.5% under this model. The temperature experiment shows that the temperature feedback correlation coefficient R2 of the second package structure reaches 0.99948, which shows good linearity in the range of 30 ℃~80 ℃; the stress experiment correlation coefficient R2 also reaches 0.99924, and the sensitivity is 6.14 pm/MPa. The accuracy of demodulation system reaches 0.05 MPa, it can demodulate stress quickly and accurately. Comparative experiments show that the monitoring system composed of grating demodulator has higher accuracy than the monitoring system composed of strain gauges, and maximum deviation value smaller 59.8%. The packaging structure of metallization method of embedded capillary copper tube combined with organic glue fixed is simple, high sensitivity, and precision, can meet the needs of large-scale construction machinery surface non-destructive real-time health monitoring.-
Key words:
- fiber Bragg grating(FBG) /
- magnetron sputtering /
- temperature sensor /
- stress sensor
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图 3 理论分析示意图。(a) 普通封装的传感器；(b) 嵌套铜管的传感器
Figure 3. Theoretical analysis diagram. (a) Universally encapsulated sensor; (b) Embedded copper tube sensor
图 5 三次温度循环实验下传感器的数据及拟合处理。(a) 完全嵌套传感器；(b) 两端嵌套传感器
Figure 5. Sensor's experimental date and fitting processing on three temperature cycle times. (a) Sensor of whole embed; (b) Sensor of two sides embed
图 6 温度实验数据平均值及拟合处理。(a) 完全嵌套传感器；(b) 两端嵌套传感器
Figure 6. Experimental date on average and fitting processing of temperature. (a) Sensor of whole embed; (b) Sensor of two sides embed
图 7 实验所需试件。(a) 光栅传感器一侧；(b) 应变片一侧
Figure 7. The specimen for the experiment. (a) The side of grating sensor; (b) The side of strain gauges
图 9 三次应力循环实验下传感器的数据及拟合处理。(a) 完全嵌套传感器；(b) 两端嵌套传感器
Figure 9. Sensor's experimental date and fitting processing on three stress cycle times. (a) Sensor of whole embed; (b) Sensor of two sides embed
图 10 应力实验数据平均值及拟合处理。(a) 完全嵌套传感器；(b) 两端嵌套传感器
Figure 10. Experimental date on average and fitting processing of stress. (a) Sensor of whole embed; (b) Sensor of two sides embed
表 1 应变转化应力汇总表
Table 1. The summary table of strain convert into stress
Strain/με Stress/MPa Strain/με Stress/MPa Experimental Average Experimental Average 204 949 204 207.33 41.47 1002 976.67 195.33 214 979 386 1139 403 397.67 79.53 1207 1174.67 234.93 404 1178 570 1328 597 587.67 117.53 1403 1367 273.4 596 1370 759 1528 795 781.33 156.27 1613 1573 314.6 790 1578 
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表 2 理论、应变片、解调仪应力汇总表
Table 2. The stress summary table of theory, strain gauges and demodulation
Theory stress/MPa Stress/MPa Stress gauge Demodulation Convert value Deviate with theory Value Deviate with theory 40 41.47 1.47 41.43 1.43 80 79.53 0.47 80.67 0.67 120 117.53 2.47 119.54 0.46 160 156.27 3.73 160.23 0.23 200 195.33 4.67 198.12 1.88 240 234.93 5.07 238.97 1.03 280 273.4 6.6 278.39 1.61 320 314.6 5.4 317.35 2.65
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